Silicon micromachining
by M. Elwenspoek, M. Elwenspoek, H. V. Jansen · 1998
No description available.
SiliconMicromachiningEtchingElectronic devices & materialsTechnologyMicroelectronicsSemiconductor PhysicsTechnology & Industrial ArtsScience/MathematicsElectronics - Circuits - GeneralEngineering - Electrical & ElectronicMaterial Science