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Adhesion aspects in MEMS-NEMS

by Seong H. Kim, Michael T. Dugger, K. L. Mittal

Cover of Adhesion aspects in MEMS-NEMS

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Nanoelectromechanical systemsMicroelectromechanical systemsSurfaces (Technology)AdhesionSurfaces (technology)NanostructuresMicro-Electrical-Mechanical SystemsAdhesivenessMicrosystèmes électromécaniquesNanosystèmes électromécaniquesAdhésion (Physique)Surfaces (Technologie)