Micro mechanical systems
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Microelectromechanical systems -- Handbooks, manuals, etcMicroelectromechanical systemsHandbooks, manualsElectromechanical devicesMicroelectronicsMicrosystèmes électromécaniquesGuides, manuelsTECHNOLOGY & ENGINEERINGMechanicalMikromechanikMikrosystemtechnikTecnologia