Fabrication of silicon microprobes for optical near-field applications

Name: Fabrication of silicon microprobes for optical near-field applications
Author: Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

by Phan Ngoc Minh, Ono Takahito, Esashi Masayoshi

Cover of Fabrication of silicon microprobes for optical near-field applications

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MicromachiningSiliconNear-field microscopyMicroprobe analysisMicro-usinageAnalyse par microsondeMicroscopie en champ procheSiliciumTECHNOLOGY & ENGINEERINGOptics