Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing

Name: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing
Author: Robert J. Nemanich, C. Robert Helms

by Robert J. Nemanich, C. Robert Helms

Cover of Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing

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Crystal growthSemiconductorsCongressesSurface preparationScience/MathematicsSurface chemistry