Database needs for modeling and simulation of plasma processing

Name: Database needs for modeling and simulation of plasma processing
Author: National Research Council Staff, Physical Sciences, Mathematics, and Applications Commission, Division on Engineering and Physical Sciences Staff

by National Research Council Staff, Physical Sciences, Mathematics, and Applications Commission, Division on Engineering and Physical Sciences Staff

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Computer simulationCongressesDatabasesPlasma engineeringSemiconductorsDesign and constructionPlasma (ionized gases)

Database needs for modeling and simulation of plasma processing by National Research Council Staff, Physical Sciences, Mathematics, and Applications Commission, Division on Engineering and Physical Sciences Staff — book · Vinony