Measurement Technology for Micro-Nanometer Devices

Name: Measurement Technology for Micro-Nanometer Devices
Author: Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue

by Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue

Cover of Measurement Technology for Micro-Nanometer Devices

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Physical measurementsMeasurementNanotechnologyTestingMicrotechnologyMicroelectromechanical devicesMicroscopy, techniqueMicroelectromechanical systems