Handbook of Silicon Based MEMS Materials and Technologies

Name: Handbook of Silicon Based MEMS Materials and Technologies
Author: Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss

by Markku Tilli, Mervi Paulasto-Krockel, Teruaki Motooka, Matthias Petzold, Horst Theuss

Cover of Handbook of Silicon Based MEMS Materials and Technologies

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Microelectromechanical systemsSiliconElectronic apparatus and appliances, design and constructionMaterialsElectric propertiesMicro-Electrical-Mechanical SystemsMicrosystèmes électromécaniquesMatériauxTECHNOLOGY & ENGINEERINGMechanical