Device and Process Technologies for Mems ,Microelectronics, and Photonics

Name: Device and Process Technologies for Mems ,Microelectronics, and Photonics
Author: Jung-Chih Chiao, Alex Hariz, Jamieson, David, Vijay Varadan

by Jung-Chih Chiao, Alex Hariz, Jamieson, David, Vijay Varadan

Cover of Device and Process Technologies for Mems ,Microelectronics, and Photonics

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PhotonicsPhotomechanical processesPhotolithographyMicroelectromechanical systemsCongressesPhoton detectorsDesign and construction