Materials modification by energetic atoms and ions

Name: Materials modification by energetic atoms and ions
Author: Materials Research Society. Meeting Symposium., Kenneth S. Grabowski, Scott A. Barnett

by Materials Research Society. Meeting Symposium., Kenneth S. Grabowski, Scott A. Barnett

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CongressesEtchingIon bombardmentPlasma etchingSemiconductorsThin filmsScience/MathematicsElectronic CircuitsMaterials, research