epitaxial

adj

Etymology: Etymology tree English epitaxy Proto-Indo-European *h₂el-der.? Proto-Italic *-ālis Latin -ālisbor. Old French -albor. ▲ Latin -ālis Old French -elbor. ▲ Latin -ālisbor. Middle English -al English -al English epitaxial From epitaxy + -al.

1. Of, pertaining to, or employing epitaxy

   “It should be noted that a high temperature anneal in Ar, H₂, or high vacuum is a well established pre-epitaxial growth step by which a native oxide film is removed to obtain a good quality epitaxial layer[…].”