Chlorosilanes

chemical compound

Trichlorosilane (TCS) is an inorganic compound with the formula HCl3Si. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a siloxane polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.

Dichlorosilane, or DCS as it is commonly known, is a chemical compound with the formula H2SiCl2. In its major use, it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS·NH3 (i.e. 16:1), usually results in lower stress nitride films.

thumb | right | Space-filling model of the chlorosilane molecule, SiH3Cl In inorganic chemistry, chlorosilanes are a group of reactive, chlorine-containing chemical compounds, related to silane () and used in many chemical processes. Each such chemical has at least one silicon-chlorine () bond. Trichlorosilane is produced on the largest scale. The parent chlorosilane is silicon tetrachloride ().

Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.

Hexachlorodisilane is the inorganic compound with the chemical formula Si2Cl6. It is a colourless liquid that fumes in moist air. It has specialty applications in as a reagent and as a volatile precursor to silicon metal.

Trichloro(chloromethyl)silane is a compound with formula Si(CH2Cl)Cl3.