Recent publications · Crossref
5 total works indexed
- Temperature Dependence of Quality Factor in MEMS Resonators
· 2008 · cited 241x
- Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation for MEMS Resonators
· 2006 · cited 182x
- Temperature-Insensitive Composite Micromechanical Resonators
· 2009 · cited 157x
- Temperature-compensated high-stability silicon resonators
· 2007 · cited 109x
- Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators
· 2007 · cited 97x
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