EntityQ899143· pop 7· linked from 10 articlesIon platingSign in to savechemical processConnectionsgasEntityInternational Standard Book NumberEntityplasmaEntityvacuumEntityionEntitydigital object identifierEntityLibrary of Congress Control NumberEntityOCLC, Inc.EntityOpen LibraryEntityQ22908627EntitySpringer Science+Business MediaEntityinert gasEntityChemical vapor depositionEntitycoatingEntityphysical vapor depositionEntitysputteringEntitySandia National LaboratoriesEntityWiley-VCHEntitysputter depositionEntityIOP PublishingEntityCategoriesChemical processesPhysical vapor deposition techniquesThin film deposition