micro-electromechanical systems
Sign in to savethumb|MEMS microcantilever resonating inside a scanning electron microscope thumb|Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"
Research
646 papers- Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications.International journal of molecular sciences · 2011
- Editorial for the Special Issue on Micro-Electromechanical System Inertial Devices.Micromachines · 2023
- A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application.Frontiers in public health · 2021
- Micro-electromechanical sensors in the analytical field.The Analyst · 2009
- Infrastructure sensing.Interface focus · 2016
via PubMed
Article
19 sectionsContents
- History
- Types
- Materials
- Basic processes
- Deposition processes
- Physical deposition
- Chemical deposition
- Patterning
- Lithography
- Etching processes
- Wet etching
- Dry etching
- Manufacturing technologies
- Applications
- Industry structure
- See also
- References
- Further reading
- External links
thumb|MEMS microcantilever resonating inside a scanning electron microscope thumb|Proposal submitted to DARPA in 1986 first introducing the term "microelectromechanical systems"
MEMS (micro-electromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2. They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as microsensors).