Taijirō Amazawa

Person · Open Library

Works

21

via Open Library + Wikidata

Recent publications · Crossref

5 total works indexed

1. Ultrathin oxide films deposited using electron cyclotron resonance sputter

   · 1999 · cited 29x

2. Selective Titanium Silicide Chemical Vapor Deposition with Surface Cleaning by Silane and Ohmic Contact Formation to Very Shallow Junctions

   · 1993 · cited 16x

3. Surface State Generation of Mo Gate Metal Oxide Semiconductor Devices Caused by Mo Penetration into Gate Oxide

   · 1998 · cited 16x

4. Effect of Silicon Surface Cleaning on the Initial Stage of Selective Titanium Silicide Chemical Vapor Deposition

   · 1990 · cited 14x

5. Reaction and Film Properties of Selective Titanium Silicide Low‐Pressure Chemical Vapor Deposition