tribromosilane
Sign in to saveTribromosilane is the chemical compound with the formula HBr3Si. At high temperatures, it decomposes to produce silicon, and is an alternative to purified trichlorosilane of ultrapure silicon in the semiconductor industry.
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Tribromosilane is the chemical compound with the formula HBr3Si. At high temperatures, it decomposes to produce silicon, and is an alternative to purified trichlorosilane of ultrapure silicon in the semiconductor industry.
The Schumacher Process of silicon deposition uses tribromosilane gas to produce polysilicon, but it has a number of cost and safety advantages over the Siemens Process to make polysilicon.
Excerpted from Wikipedia’s “tribromosilane” article, available under the CC BY-SA 4.0 licence.