EntityQ3218288· pop 5· linked from 63 articlesArgon fluoride laserSign in to saveused in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific researchConnectionsfluorineEntityargonEntityInternational Standard Book NumberEntitynoble gasesEntityultraviolet radiationEntityIBMEntitydigital object identifierEntitynuclear fusionEntityintegrated circuitEntityelectronvoltEntityQ180686EntityspectrumEntitybibcodeEntityMoore's lawEntitycarcinogenEntityQ229883EntitymicroelectronicsEntitycoordination complexEntitycoherenceEntityenergy efficiencyEntityCategoriesArgonExcimer lasersFluorine