EntityQ1076175· pop 12· linked from 36 articlesimmersion lithographySign in to savephotolithography technique for manufacturing integrated circuitsConnectionsphotolithographyEntitysiliconEntityultraviolet radiationEntityIBMEntitydigital object identifierEntityInternational Standard Serial NumberEntityrefractive indexEntitybibcodeEntitypolarizationEntityangular resolutionEntitysystem on a chipEntityBloomberg BusinessweekEntitysemiconductor waferEntitysemiconductor device fabricationEntityanti-reflective coatingEntityphotoresistEntitynumerical apertureEntityleadingEntity22 nm lithography processEntity10 nm lithography processEntityCategoriesLithography (microfabrication)Taiwanese inventions