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Buffered oxide etch · Vinony

EntityQ2927645· pop 8· linked from 9 articles

Buffered oxide etch

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Chemical used in microfabrication

Connections

International Standard Book Number

digital object identifier

silicon dioxide

hydrofluoric acid

buffer solution

Brønsted–Lowry acid–base theory

photolithography

silicon nitride

ammonium fluoride

process control

ammonium bifluoride

Thermal oxidation

Categories

Etching (microfabrication)

Sources

wikipedia.externallinksexternallink

What links here9 pages

micro-electromechanical systems

ammonium fluoride

hydrofluoric acid

semiconductor device fabrication

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