EntityQ2131545· pop 5· linked from 16 articlesRapid thermal processingSign in to savequickly heats semiconductor wafers to high temperaturesConnectionssemiconductor waferEntitysemiconductor device fabricationEntitysemiconductorEntitypyrometerEntitythermal equilibriumEntityIon implantationEntityThermal oxidationEntitydopantEntityCategoriesSemiconductor device fabrication