🌐EnglishEnglishDeutschEspañolFrançaisPortuguêsفارسی한국어中文日本語EntityQ1578120· pop 10· linked from 30 articlesthrough-silicon viametal-plated holes used to vertically electrically connect several dies that are atop each otherConnectionsdynamic random-access memoryEntitythree-dimensional integrated circuitEntityCategoriesIntegrated circuitsSemiconductor device fabrication