EntityQ486936· pop 8· linked from 60 articlesdeep reactive-ion etchingSign in to savehighly anisotropic etch processConnectionsRobert BoschEntityisotropyEntitydynamic random-access memoryEntitysiliconEntitycapacitorEntitykelvinEntitychemical reactionEntityionEntitydigital object identifierEntityInternational Standard Serial NumberEntityintegrated circuitEntitynanometreEntityfunctional groupEntityQ180686EntitybibcodeEntityQ118398EntitypolytetrafluoroethyleneEntityRobert BoschEntityGerlingenEntityanisotropyEntityCategoriesEtching (microfabrication)MicrotechnologySemiconductor device fabrication