deep reactive-ion etching
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Connections
Robert Bosch
Entity
isotropy
Entity
dynamic random-access memory
Entity
silicon
Entity
capacitor
Entity
kelvin
Entity
chemical reaction
Entity
ion
Entity
digital object identifier
Entity
International Standard Serial Number
Entity
integrated circuit
Entity
nanometre
Entity
functional group
Entity
Q180686
Entity
bibcode
Entity
Q118398
Entity
polytetrafluoroethylene
Entity
Robert Bosch
Entity
Gerlingen
Entity
anisotropy
Entity