titanium sublimation pump
Sign in to savea type of vacuum pump used to remove residual gas in ultra high vacuum systems.
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oxygen
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titanium
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International Standard Book Number
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methane
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carbon monoxide
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digital object identifier
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International Standard Serial Number
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sublimation
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vacuum pump
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American Institute of Physics
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getter
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turbomolecular pump
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ion pump
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Ultra-high vacuum
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