cleanroom
Sign in to save320px|thumb|right| Entrance to a cleanroom with no air shower thumb|right| Cleanroom used for the production of microsystems. The yellow (red-green) lighting is necessary for [[photolithography, to prevent unwanted exposure of photoresist to light of shorter wavelengths.]] thumb|right| Cleanroom from outside thumb|right| Cleanroom for microelectronics manufacturing with [[fan filter units installed in the ceiling grid]] thumb|right| Cleanroom cabin for precision measuring tools thumb| Typical cleanroom head garment
Article
18 sectionsContents
- History
- Overview
- Basic construction
- Airflow principles
- Cleanrooms of different kinds
- Aseptic Practices/Processing
- Operating procedure
- Personnel contamination of cleanrooms
- Cleanroom classification and standardization
- ISO 14644-1 and ISO 14698
- US FED STD 209E
- EU GMP classification
- BS 5295
- USP <800> standards
- Ramifications and further applications
- See also
- References
- External links
320px|thumb|right| Entrance to a cleanroom with no air shower thumb|right| Cleanroom used for the production of microsystems. The yellow (red-green) lighting is necessary for [[photolithography, to prevent unwanted exposure of photoresist to light of shorter wavelengths.]] thumb|right| Cleanroom from outside thumb|right| Cleanroom for microelectronics manufacturing with [[fan filter units installed in the ceiling grid]] thumb|right| Cleanroom cabin for precision measuring tools thumb| Typical cleanroom head garment
A cleanroom or clean room is an engineered space that maintains a very low concentration of airborne particulates. It is well-isolated, well-controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as semiconductor device manufacturing. A cleanroom is designed to keep everything from dust to airborne organisms or vaporised particles away from it, and so from whatever material is being handled inside it.