EntityQ977848· pop 7· linked from 3 articlesMIS capacitorSign in to saveConnectionsmetalEntitysiliconEntityvacuumEntitysemiconductorEntitydigital object identifierEntitysilicon dioxideEntityinsulatorEntitybibcodeEntityQ118398Entityfield-effect transistorEntitypermittivityEntityMOSFETEntityQ22908627Entityrelative permittivityEntityChemical vapor depositionEntitydepletion regionEntityhigh-κ dielectricEntityThermal oxidationEntityevaporationEntityCategoriesCapacitors