EntityQ55236· pop 7· linked from 12 articlesScanning Helium Ion MicroscopeSign in to saveimaging technology based on a scanning helium ion beamConnectionsscanning electron microscopeEntityheliumEntityelectronEntitymicroscopeEntitynanotechnologyEntityplasmaEntityionEntityphotonEntitydigital object identifierEntitynanometreEntityQ180686EntitybibcodeEntityQ229883Entitydepth of fieldEntitymatter waveEntityNational Institute of Standards and TechnologyEntityCarl Zeiss AGCompanymicroscopyEntityoptical resolutionEntityfocused ion beamEntityCategoriesHeliumMicroscopes