Home›Browse›光刻机🌐中文EnglishDeutschEspañolItalianoРусскийالعربية한국어中文日本語EntityQ1751548· pop 9· linked from 35 articles光刻机Sign in to saveAlso known as "Mask Aligner" stepper, steppers半導體製程設備之一Wikidata factsSubclass ofprojectorSources (3)wikidata.orgdocs.openalex.orgweb.archive.orgvia Wikidata · CC0Available in 9 languagesEspañolDeutsch中文日本語РусскийالعربيةCatalan한국어via Wikidata sitelinks · CC0