photolithography
Sign in to savethumb|Silicon wafer that has undergone photolithography Photolithography (also known as optical lithography) is a process that involves using light to transfer a pattern onto a photoresist layer deposited on a sample, typically a silicon wafer. It is used in the manufacturing of integrated circuits.
Article
22 sectionsContents
- Etymology
- History
- Process
- Cleaning
- Preparation
- Photoresist application
- Exposure and developing
- Etching, implantation
- Photoresist removal
- Exposure ("printing") systems
- Contact and proximity
- Projection
- Photomasks
- Resolution in projection systems
- Depth of Focus
- Stochastic effects
- Light sources
- Experimental methods
- Economy
- See also
- References
- External links
thumb|Silicon wafer that has undergone photolithography Photolithography (also known as optical lithography) is a process that involves using light to transfer a pattern onto a photoresist layer deposited on a sample, typically a silicon wafer. It is used in the manufacturing of integrated circuits.
The process begins with a photosensitive material, called a photoresist, being applied to the substrate. A photomask that contains the desired pattern is then placed over the photoresist. Light is shone through the photomask, exposing the photoresist in certain areas. The exposed areas undergo a chemical change, making them either soluble or insoluble in a developer solution. After development, the pattern is transferred onto the sample through etching, chemical vapor deposition, physical vapor deposition, plating, or ion implantation processes.