🌐EnglishEnglishEspañolFrançaisItalianoPortuguêsРусскийفارسی한국어中文日本語EntityQ869122· pop 13· linked from 177 articles65 nm lithography processsemiconductor manufacturing processes with a 65 nm MOSFET technology nodeConnectionssemiconductor device fabricationEntityXeonEntityCategoriesInternational Technology Roadmap for Semiconductors lithography nodes