🌐EnglishEnglishBahasa IndonesiaDeutschEspañolFrançaisItalianoPolskiPortuguêsTiếng ViệtTürkçeРусскийالعربيةفارسی한국어中文日本語EntityQ371965· pop 20· linked from 71 articlesextreme ultraviolet lithographya next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.ConnectionsUnited StatesCountryChinaCountryNetherlandsCategoriesExtreme ultravioletLithography (microfabrication)