extreme ultraviolet lithography
Sign in to saveAlso known as EUV lithography, EUVL
a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm.
Wikidata facts
- Image
- Lithographie EUV.jpg
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- Commons category
- Extreme ultraviolet lithography
- short name
- EUV
Sources (2)
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