🌐EnglishEnglishBahasa IndonesiaEspañolFrançaisItalianoPortuguêsРусскийالعربيةفارسی한국어中文日本語EntityQ4641190· pop 15· linked from 182 articles5 nm lithography processsemiconductor manufacturing processes with a 5 nm FinFET technology nodeConnectionssemiconductor device fabricationEntitymultigate deviceEntityCategoriesApplication-specific integrated circuitsInternational Technology Roadmap for Semiconductors lithography nodesJapanese inventions