🌐EnglishEnglishDeutschРусскийالعربيةفارسی한국어中文EntityQ63207578· pop 7· linked from 135 articles3 nm lithography processsemiconductor manufacturing processes with a 3 nm GAAFET technology nodeConnectionsFinFETEntitymultigate deviceEntityCategoriesApplication-specific integrated circuitsInternational Technology Roadmap for Semiconductors lithography nodes