
Microtechnology is technology whose features have dimensions of the order of one micrometre (one millionth of a metre, or 10−6 metre, or 1μm). It focuses on physical and chemical processes as well as the production or manipulation of structures with one-micrometre magnitude.
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Article · 中文
微技术(英語:Micro-technology)包含了微機電感測和控制、驅動元件製程開發技術、微機電系統整合技術、射頻(RF MEMS)、光學(Optical MEMS)、生物醫學(Bio MEMS)、電腦與週邊(Computer Peripheral MEMS)微機電系統研究。
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