LIGA
Sign in to saveAlso known as Lithographie, Galvanoformung, Abformung
right|thumb|The X-ray LIGA process was originally developed at the Forschungszentrum Karlsruhe, Germany, to produce nozzles for Enriched uranium#Aerodynamic processes|uranium enrichment. thumb|SEM picture of a polymer LIGA structure made by molding. Smallest polymer width is 6 μm; polymer height is 120 μm, the aspect ratio is, therefore, 20. thumb|SEM picture of a polymer LIGA structure made by x-ray lithography. Step length is 3 μm, step height is 0.7 μm. The pattern extends downwards towards the substrate for 150 μm leading to an aspect ratio of the contour of 200. L
In the Vinony graph
Within Vinony's link graph, LIGA is referenced by 29 other articles, and connects out to German, silicon and titanium.
It sits within the topics Lithography (microfabrication), Materials science and Microtechnology.
Its subject is documented across 7 Wikipedia language editions.
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- Instance of
- technology
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- LIGA-Verfahren.svg
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- Commons category
- LIGA
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via Wikidata · CC0
~13 min read
Encyclopedic overview
17 sectionsContents
- Overview
- X-Ray LIGA
- UV LIGA
- Process details
- Mask
- Substrate
- Exposure
- Development
- Electroplating
- Stripping
- Replication
- Commercialization
- Gallery
- Notes
- See also
- References
- External links
right|thumb|The X-ray LIGA process was originally developed at the Forschungszentrum Karlsruhe, Germany, to produce nozzles for Enriched uranium#Aerodynamic processes|uranium enrichment. thumb|SEM picture of a polymer LIGA structure made by molding. Smallest polymer width is 6 μm; polymer height is 120 μm, the aspect ratio is, therefore, 20. thumb|SEM picture of a polymer LIGA structure made by x-ray lithography. Step length is 3 μm, step height is 0.7 μm. The pattern extends downwards towards the substrate for 150 μm leading to an aspect ratio of the contour of 200. LIGA is a fabrication technology used to create high-aspect-ratio microstructures. The term is a German acronym for – lithography, electroplating, and molding.
==Overview== LIGA consists of three main processing steps: lithography, electroplating, and molding. There are two main LIGA-fabrication technologies: X-Ray LIGA, which uses X-rays produced by a synchrotron to create high-aspect-ratio structures, and UV LIGA, a more accessible method which uses ultraviolet light to create structures with relatively low aspect ratios.
Excerpted from Wikipedia’s “LIGA” article, available under the CC BY-SA 4.0 licence.