EntityQ1520588· pop 16· linked from 50 articlesplanar processSign in to saveprocess used to make microchipsConnectionsintegrated circuitEntitypassivationEntityNASAConceptsiliconEntityInternational Standard Book NumberEntitytransistorEntitycapacitorEntityresistorEntitydigital object identifierEntityInternational Standard Serial NumberEntityoxideEntitysilicon dioxideEntityBell LabsEntityRobert NoyceEntityASML HoldingEntityphotolithographyEntitysemiconductor deviceEntitySpringer Science+Business MediaEntityWileyEntitysemiconductor device fabricationEntityCategoriesPlanes (geometry)Semiconductor device fabricationSwiss inventions