EntityQ605757· pop 7· linked from 54 articlesCopper interconnectSign in to saveused in semiconductor integrated circuitsConnectionscopperEntityaluminiumEntitysiliconEntityIBMEntitydigital object identifierEntityInternational Standard Serial NumberEntityintegrated circuitEntitydiffusionEntityQ259011EntityQ180686EntitybibcodeEntityQ229883EntitydopingEntityQ22908627EntityphotolithographyEntitysemiconductor device fabricationEntitypolyethylene glycolEntitytitanium nitrideEntitydamasceningEntityelectrical resistivity and conductivityEntityCategoriesCopperIntegrated circuits