EntityQ757625· pop 16· linked from 109 articlesatomic layer depositionSign in to saveThin-film deposition techniqueConnectionsInternational Standard Serial NumberEntitydynamic random-access memoryEntityChemical vapor depositionEntitysemiconductor device fabricationEntityhigh-κ dielectricEntityCopper interconnectEntityFinlandCountrySoviet UnionConceptPeriodic tableConceptInternational Standard Book NumberEntitycapacitorEntityvacuumEntitysemiconductorEntitydigital object identifierEntityIntelEntitywater vaporEntitycatalysisEntitysilicon dioxideEntityhydrogen sulfideEntityOCLC, Inc.EntityCategoriesChemical vapor depositionFinnish inventionsSemiconductor device fabricationSoviet inventionsThin film deposition