EntityQ644248· pop 9· linked from 93 articlesion beamSign in to savebeam of charged atoms (ions)Connectionsspace chargeEntityNASAConceptelectronEntityargonEntityInternational Standard Book NumberEntitykryptonEntityxenonEntityionEntitysemiconductorEntityWayback MachineEntitynuclear physicsEntityparticle physicsEntityatomic physicsEntityelectronvoltEntitysilicon dioxideEntityparticle acceleratorEntitycathodeEntityDNA repairEntityion thrusterEntityradiobiologyEntityCategoriesAccelerator physicsIonsPlasma technology and applicationsSemiconductor analysisSemiconductor device fabricationThin film deposition