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Shallow trench isolation · Vinony

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EntityQ1424524· pop 7· linked from 25 articles

Shallow trench isolation

integrated circuit

Connections

chemical-mechanical planarization

International Standard Book Number

Categories

Semiconductor device fabrication Semiconductor structures

Sources

wikipedia.externallinksexternallink

electric current

Entity

Wayback Machine

digital object identifier

integrated circuit

silicon dioxide

semiconductor device

semiconductor device fabrication

250 nm lithography process

Reactive-ion etching

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What links here25 pages

microfabrication

45 nm lithography process

chemical-mechanical planarization

microtechnology

micro-electromechanical systems

p–n junction isolation

front end of line

extreme ultraviolet lithography

microelectronics

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