thumb|250px|Typical LOCOS structure. 1) Silicon 2) Silicon dioxide
thumb|250px|Typical LOCOS structure. 1) Silicon 2) Silicon dioxide
LOCOS, short for LOCal Oxidation of Silicon, is a microfabrication process where silicon dioxide is formed in selected areas on a silicon wafer having the Si-SiO2 interface at a lower point than the rest of the silicon surface. As of 2008 it was largely superseded by shallow trench isolation.
Discovered by embedding cosine similarity (sentence-transformers MiniLM, 384-dim).