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LOCOS
Sign in to savethumb|250px|Typical LOCOS structure. 1) Silicon 2) Silicon dioxide
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thumb|250px|Typical LOCOS structure. 1) Silicon 2) Silicon dioxide
LOCOS, short for LOCal Oxidation of Silicon, is a microfabrication process where silicon dioxide is formed in selected areas on a silicon wafer having the Si-SiO2 interface at a lower point than the rest of the silicon surface. As of 2008 it was largely superseded by shallow trench isolation.