EntityQ7554001· pop 6· linked from 39 articlesSoft lithographySign in to savetechniques that create structures using stampsConnectionsWileyEntitytechnologyEntityInternational Standard Book NumberEntitybiotechnologyEntitynanotechnologyEntitydigital object identifierEntityInternational Standard Serial NumberEntitynanometreEntityQ180686EntitybibcodeEntitystructureEntityQ229883Entityresearch and developmentEntityelastomerEntityQ22908627Entitylevel of measurementEntityphotolithographyEntitymicrofluidicsEntitynanoelectronicsEntityelectron beam lithographyEntityCategoriesLithography (microfabrication)