EntityQ1549368· pop 14· linked from 56 articlesThermal oxidationSign in to saveprocess creating a thin layer of silicon dioxideConnectionssemiconductor waferEntityDeal–Grove modelEntityoxygenEntitysodiumEntitymetalEntitysiliconEntitychlorineEntityInternational Standard Book NumberEntityionEntitymass densityEntitycrystalEntitydegree CelsiusEntitydigital object identifierEntityquartzEntitydustEntityhydrochloric acidEntitywater vaporEntityoxideEntitysodium chlorideEntitysilicon dioxideEntityCategoriesMaterialsMicrotechnologyMOSFETsNanoelectronicsNanomaterialsSemiconductor technologySilicon