EntityQ1135912· pop 11· linked from 43 articles1.5 µm lithography processSign in to savesemiconductor manufacturing processes with a 1.5 µm MOSFET technology nodeWikidata factsSubclass ofphotolithographyFollowed by1 µm lithography processFollows3 µm lithography processShow 1 more factP1343International Technology Roadmap for Semiconductorsvia Wikidata · CC0Connectionssemiconductor device fabricationEntitylist of semiconductor scale examplesEntityCategories1982 introductionsInternational Technology Roadmap for Semiconductors lithography nodes