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3 µm lithography process
Sign in to saveAlso known as 3µm, 3 µm process, 3 micron process
semiconductor manufacturing processes with a 3 µm MOSFET technology node
Wikidata facts
- Subclass of
- photolithography
- Followed by
- 1.5 µm lithography process
- Follows
- 6 µm lithography process
Show 1 more fact
- described by source
- International Technology Roadmap for Semiconductors
Sources (1)
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