EntityQ1135970· pop 11· linked from 45 articles3 µm lithography processSign in to savesemiconductor manufacturing processes with a 3 µm MOSFET technology nodeWikidata factsSubclass ofphotolithographyFollowed by1.5 µm lithography processFollows6 µm lithography processShow 1 more factP1343International Technology Roadmap for Semiconductorsvia Wikidata · CC0Connectionssemiconductor device fabricationEntitylist of semiconductor scale examplesEntityCategoriesComputer-related introductions in 1975International Technology Roadmap for Semiconductors lithography nodes