EntityQ1135919· pop 11· linked from 47 articles10 µm lithography processSign in to savesemiconductor manufacturing processes with a 10 µm MOSFET technology nodeWikidata factsSubclass ofphotolithographyFollowed by6 µm lithography processShow 1 more factP1343International Technology Roadmap for Semiconductorsvia Wikidata · CC0Connectionssemiconductor device fabricationEntitylist of semiconductor scale examplesEntityCategories1971 introductionsInternational Technology Roadmap for Semiconductors lithography nodes