EntityQ132013· pop 15· linked from 104 articleshigh-κ dielectricSign in to savedielectric with high dielectric constant κConnectionsMOSFETEntitysemiconductor device fabricationEntitysubthreshold conductionEntitysiliconEntityInternational Standard Book NumberEntityhafniumEntitycapacitorEntityIBMEntitydigital object identifierEntityIntelCompanykappaEntitynanometreEntitysilicon dioxideEntitycapacitanceEntityInstitute of Electrical and Electronics EngineersEntitybibcodeEntityMoore's lawEntityquantum tunnelingEntityNECCompanydynamic random-access memoryEntityCategoriesElectronic engineeringHigh-κ dielectricsMOSFETsSemiconductor fabrication materialsTransistors