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Low-k dielectric · Vinony

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EntityQ1872538· pop 7· linked from 38 articles

Low-k dielectric

Insulator in semiconductor devices

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Connections

relative permittivity

Categories

Materials science Semiconductor fabrication materials

Sources

wikipedia.externallinksexternallink

International Standard Book Number

Entity

digital object identifier

integrated circuit

electrical circuit

silicon dioxide

polytetrafluoroethylene

thermal expansion

Chemical vapor deposition

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