EntityQ2392011· pop 9· linked from 63 articlesplasma etchingSign in to saveindustrial processConnectionsISM bandEntityatomEntityoxygenEntityfluorineEntityatmosphere of EarthEntityplasmaEntitychemical reactionEntityionEntitysemiconductorEntitydigital object identifierEntityelectric fieldEntityInternational Standard Serial NumberEntityintegrated circuitEntitysilicon dioxideEntityionizationEntityQ180686EntityradicalEntityadsorptionEntitybibcodeEntityQ118398EntityCategoriesPlasma processingSemiconductor device fabrication