Home›Plasma processing›plasma etching🌐EnglishEnglishDeutschEspañolFrançaisNederlands中文日本語EntityQ2392011· pop 9· linked from 63 articlesplasma etchingindustrial processWikidata factsShow 1 more factCommons categoryPlasma etchingSources (3)wikidata.orgdocs.openalex.orgweb.archive.orgvia Wikidata · CC0Available in 8 languagesEspañolFrançaisDeutsch中文BulgarianCatalanNederlandsvia Wikidata sitelinks · CC0ConnectionsISM bandEntityatomEntityCategoriesPlasma processingSemiconductor device fabrication