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plasma etching · Vinony

EntityQ2392011· pop 9· linked from 63 articles

plasma etching

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industrial process

Connections

atmosphere of Earth

chemical reaction

digital object identifier

International Standard Serial Number

integrated circuit

silicon dioxide

Categories

Plasma processing Semiconductor device fabrication

Sources

wikipedia.externallinksexternallink

What links here63 pages

NAURA Technology Group

tungsten disilicide

failure analysis

boron trichloride

microfabrication

Plasma cleaning

polydimethylsiloxane

industrial etching

micro-electromechanical systems

tetrafluoromethane

Reactive-ion etching

Copper interconnect

deep reactive-ion etching

photolithography

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