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Ion beam lithography · Vinony

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EntityQ1672059· pop 5· linked from 22 articles

Ion beam lithography

lithographic technique that uses a scanning ion beam

Connections

electron beam lithography

International Standard Book Number

Categories

Semiconductor device fabrication

Sources

wikipedia.externallinksexternallink

ion

Entity

Wayback Machine

integrated circuit

particle accelerator

photolithography

focused ion beam

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What links here22 pages

X-ray lithography

nanolithography

Soft lithography

micro-electromechanical systems

rare earth element

photolithography

electron beam lithography

extreme ultraviolet lithography

Dip-pen nanolithography

photonic crystal

Nanoimprint lithography

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