Home›Browse›Ion beam lithography🌐EnglishEnglishDeutschPortuguêsРусскийفارسی中文日本語EntityQ1672059· pop 5· linked from 22 articlesIon beam lithographySign in to savelithographic technique that uses a scanning ion beamWikidata factsSubclass oflithographySources (3)wikidata.orgdocs.openalex.orgweb.archive.orgvia Wikidata · CC0Available in 5 languagesDeutschРусскийPortuguêsفارسیvia Wikidata sitelinks · CC0